Device for treating substrates in a fluid container

Details Device for treating substrates in a fluid container Device for treating substrates in a fluid container

1996-12-06

2001-06-05

Stinson, Frankie L. (Department: 3405)

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

C134S184000, C134S186000, C134S902000

Reexamination Certificate

active

06240938

ABSTRACT:

BACKGROUND OF THE INVENTION
The present invention relates to a device for treating substrates in a fluid container.
Devices of this kind are, for example, known from U.S. Pat. No. 5,275,184, International Patent Application (PCT) WO 95/02473 and German Patent Application 44 13 077. The wafers in these arrangements are stationarily and fixedly arranged within the fluid container during treatment. Upon introduction of the treatment fluid, for example, a chemical or a cleaning fluid, via an inlet opening or fluid nozzles, flow conditions vary locally so that flow crossing points or dead angles result which are caused by the predetermined fluid flow or spray angles.
Upon treatment of the substrates with ultrasound, for example, for improving and accelerating the cleaning process, a uniform subjection of the substrates to sound is not possible with the known devices because the soundwave cones cause different sound intensities or dead angles. In the device known from WO 95/02473, the ultrasound generating devices are provided at the sidewalls. In order to improve the uniform subjection of the substrates to sound, the guide devices for the substrates are arranged in a staggered arrangement at the inner surface of the sidewalls of the fluid container. This provides only to a limited extent a more uniform subjection of the substrates to sound because these guide devices, which are positioned opposite to the ultrasound generating devices, cause different sound intensities due to the resulting damping effect within areas having guides and within areas free of these guides.
It is therefore an object of the present invention to provide a device of the aforementioned kind with which an improved, more uniform, and/or more intensive treatment of the substrates is possible.
SUMMARY OF THE INVENTION
A treatment apparatus for treating substrates according to the present invention is primarily characterized by:
A fluid container; and
A device for moving in a reciprocating manner the substrates within the fluid container during treatment.
The device preferably moves the substrates vertically.
The device comprises at least one substrate receiving element connected within the container and the substrates are preferably positioned on the substrate receiving element.
The substrate receiving element is preferably a stay positioned below the substrates such that the substrates rest on the stay. The stay extends preferably perpendicularly to the end faces of the substrates.
The substrate receiving element may comprise a holding area for the substrates. The container has preferably sidewalls and the inner surface of at least one of the sidewalls is provided with guides for the substrates.
The guides are preferably in the form of slots, stays, pins, and/or knobs.
The inner surface of the at least one sidewall comprises advantageously areas free of such guides.
The areas free of guides comprise treatment elements such as inlet openings, spray nozzles, diffusors, UV light sources, and/or ultrasound generating devices.
The substrate receiving element may have at least two holding areas.
The substrate receiving element may comprise securing elements for securing the substrates.
The substrate receiving element may comprise slots.
The slots have preferably a shape matching the edge contour of the substrates.
The slots have an opening and a bottom. The width of the slots decreases from the opening to the bottom.
Advantageously, each one of the slots has a first sidewall and a second sidewall and the first sidewall extends preferably vertically while the second sidewall is positioned at a slant.
The apparatus may comprise a rotating device connected to the container for rotating the substrates during treatment.
Preferably, the apparatus further comprises at least one substrate securing device connected within the container for securing the substrates at an upper edge thereof.
Expediently, the container comprises a bottom and sidewalls, wherein at least one of the bottom and the sidewalls is embodied as an ultrasound generating device. Preferably, the ultrasound generating device may comprises areas having fluid nozzles attached thereto. The fluid nozzles are connected to the ultrasound generating device so as to allow sound transmission, or, in the alternative, the fluid nozzles and the ultrasound generating device may also be sound-insulated from one another. The fluid nozzles are then preferably positioned in a sound-proofing material.
The container comprises a bottom and sidewalls, wherein at least one of the bottom and the sidewalls has a first portion embodied as an ultrasound generating device and a second portion comprising fluid nozzles. The fluid nozzles are connected to the ultrasound generating device so as to allow sound transmission, or, in the alternative, the fluid nozzles and the ultrasound generating device are sound-insulated from one another. The fluid nozzles are then preferably positioned in a sound-proofing material.
Advantageously, the sound proofing material may be strip-shaped and the ultrasound generating device may have matching strip-shaped cutouts into which the sound-proofing material is inserted.
According to the present invention, the substrates within the fluid container can be moved during the treatment process. Thus, it is possible to change the position of substrates areas that during the treatment process cannot or can be reached only with difficulty by the treatment fluid, ultrasound and/or a light beam so that even these difficult to reach substrate areas are subjected to an improved exposure to the fluid or sound, respectively, radiation cone during the treatment. Dead angles or areas with varying intensity are thus compensated or avoided.
According to another advantageous embodiment of the invention, the substrates within the fluid container can be lifted and lowered (vertically reciprocated) during the treatment. In this manner, individual substrate areas are subjected to varying impact efficiencies of the fluid, ultrasound and/or light radiations so that overall a more uniform treatment of the substrates across the substrate surface is possible.
Preferably, the fluid container comprises a substrate receiving device in the form of a comb-shaped stay which is positioned below the substrates and extends perpendicular to the substrate end faces whereby the substrates rests on this stay. In this embodiment, at least one sidewall, respectively, its inner surface, is provided with guides for the substrates which are preferably in the form of slots, in the form of slotted transverse stays, pins, and/or knobs.
The irregularities resulting from the guides during the treatment of the substrates within the fluid container are inventively avoided or substantially reduced by moving the substrates, for example, by lifting and/or lowering the substrates within the fluid container while the substrates are being subjected to a fluid, ultrasound or light, for example, UV light. The areas which are not subjected to the treatment medium or subjected only to a limited extend are moved by the displacement of the substrates within the fluid container into the effective range of the treatment medium with improved exposure. Dead angles or areas with reduced impacting intensity are thus compensated during treatment of the substrates.
The guides for the substrates at the inner surfaces of the sidewalls of the fluid container, preferably in the form of slots, stays, pins and/or knobs, can be arranged such that areas without such guides are provided at the inner surfaces of the sidewalls, whereby preferably a staggered arrangement relative to the areas with guides is provided. In these areas free of guides inlet openings, spray nozzles, diffusors, ultrasound generating devices, UV light sources and/or further devices for treating the substrates are preferably provided.
According to an especially advantageous embodiment of the invention, the movable substrate receiving device of the fluid container comprises at least two holding areas for securing the substrates. Thus, it is possible to secure the su

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