Device for treating substrates in a fluid container

Details Device for treating substrates in a fluid container Device for treating substrates in a fluid container

1998-04-07

1999-11-30

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

With means to hold work holder in draining position above...

134155, 134184, 134902, 134186, B08B 310

Patent

active

059924314

ABSTRACT:
A device for treating substrates includes a fluid container in which the substrates are contained during treatment. A nozzle system is connected to the sidewalls and/or bottom of the fluid container and includes a plurality of nozzles for introducing a fluid into the fluid container.

REFERENCES:
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patent: 4676008 (1987-06-01), Armstrong
patent: 4858764 (1989-08-01), Domokos
patent: 5012935 (1991-05-01), Aigo
patent: 5149244 (1992-09-01), Webber et al.
patent: 5503173 (1996-04-01), Kudo et al.
patent: 5626159 (1997-05-01), Erk et al.
patent: 5672212 (1997-09-01), Manos

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