Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2005-01-25
2005-01-25
Zervigon, Rudy (Department: 1763)
Coating apparatus
Gas or vapor deposition
With treating means
C118S730000, C118S320000, C156S345310, C156S345320, C156S345540, C156S345550
Reexamination Certificate
active
06845733
ABSTRACT:
The invention relates to the technical field of plasma treatment of planar elements such as plates, sheets and wafers in electronics and electrical engineering, and in essence is a device for treating wafers with a plasma jet. The device comprises the following elements mounted in a closed chamber: a drive that effects angular displacement of the holders, which are provided with a common rotary drive, a plasma jet generator, and, mounted outside the closed chamber a manipulator and storage devices for the wafers. The wafer to be treated is picked up by the manipulator from the storage device and placed in the holder which together with the wafer passes over the plasma jet generator used for the treatment. The cycle may be repeated a predetermined number of times.
REFERENCES:
patent: 3278796 (1966-10-01), Takei et al.
patent: 4222345 (1980-09-01), Bergfelt et al.
patent: 4343830 (1982-08-01), Sarma et al.
patent: 5077888 (1992-01-01), Tokisue et al.
patent: 5106346 (1992-04-01), Locher et al.
patent: 5204145 (1993-04-01), Gasworth
patent: 5273588 (1993-12-01), Foster et al.
patent: 5308461 (1994-05-01), Ahonen
patent: 5539176 (1996-07-01), Ikegaya et al.
patent: 5613821 (1997-03-01), Muka et al.
patent: 5820686 (1998-10-01), Moore
patent: 5838528 (1998-11-01), Os et al.
patent: 5886864 (1999-03-01), Dvorsky
patent: 6139678 (2000-10-01), Siniaguine
patent: 6168697 (2001-01-01), Siniaguine et al.
patent: 6467297 (2002-10-01), Bollinger et al.
patent: S55-134175 (1980-10-01), None
patent: H02-312256 (1990-12-01), None
patent: H04-130187 (1992-11-01), None
patent: H5-33534 (1993-04-01), None
patent: H05-033534 (1993-04-01), None
patent: H05-038569 (1993-06-01), None
patent: H05-179428 (1993-07-01), None
patent: 4-124092 (1994-04-01), None
patent: WO 9221220 (1992-11-01), None
Bagriy Igor P.
Balats Boris M.
Shamshurin Vyacheslav G.
Tokmulin Iskander M.
Virovets Alexei B.
Greenspan, Esq. Myron
Lackenbach & Siegel LLP
Zervigon Rudy
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