Device for treating pieces of a substrate at high pressure...

Details Device for treating pieces of a substrate at high pressure... Device for treating pieces of a substrate at high pressure...

2011-01-04

2011-01-04

Kornakov, Michael (Department: 1714)

Cleaning and liquid contact with solids

Apparatus

With movable means to cause fluid motion

C134S025100, C134S060000, C134S182000

Reexamination Certificate

active

07861733

ABSTRACT:
A device for treating pieces of a substrate at high pressure, piece by piece or in batches, with a treatment medium in the supercritical or near-critical state, includes a first pressure chamber, a pipe system for supplying and discharging the treatment medium, to and from the pressure chamber under high pressure and an electric motor, which is fixed to the housing in the first pressure chamber or in a second pressure chamber coupled to the first pressure chamber under the high pressure, for driving an actuator to carry out a mechanical action in the treatment medium. The electric motor is in this case open to the treatment medium and is disposed and designed to be accessible to the treatment medium, in such a manner that during the treatment of a substrate the treatment medium flows through and around the electric motor.

REFERENCES:
patent: 3994805 (1976-11-01), Ito
patent: 5267455 (1993-12-01), Dewees et al.
patent: 5563391 (1996-10-01), Dahm
patent: 6351973 (2002-03-01), McClain et al.
patent: 6412312 (2002-07-01), McClain et al.
patent: 6427479 (2002-08-01), Komatsubara et al.
patent: 2005/0120491 (2005-06-01), Woerlee et al.
patent: 2006/0125337 (2006-06-01), Levnat
patent: 2001-012352 (2001-01-01), None
patent: 2003117513 (2003-04-01), None
patent: WO00/63483 (2000-10-01), None
Machine Translation of JP2001-012352 by Sanuki et al., published Jan. 16, 2001.
English Patent Abstract for JP 2003 117513.

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