Device for transporting substrates

Details Device for transporting substrates Device for transporting substrates

1997-04-11

1999-06-22

Bucci, David A.

Material or article handling

Apparatus for charging a load holding or supporting element...

Transporting means is a horizontally rotated arm

118500, 118502, 118503, 118728, 369270, 414908, B65G 6502

Patent

active

059136537

ABSTRACT:
Apparatus for transporting substrates to and from at least one device (1) for holding substrates (2), the at least one device having a substrate support (5) disposed in a vacuum chamber (4, 4', 4"). The apparatus includes at least one displaceably disposed gripper (75), which can be displaced by a mechanical and/or electro-magnetically or magnetically operating positioning device (130) between a substrate gripping position and a substrate release position, and a centering device (157, 157', 161) for centering a substrate relative to the substrate support in conjunction with transport of the substrate by the apparatus to the substrate support.

REFERENCES:
patent: 3253853 (1966-05-01), Loyer et al.
patent: 4199183 (1980-04-01), Hecker
patent: 4676710 (1987-06-01), Shiraishi
patent: 4948187 (1990-08-01), Blaseck
patent: 4969790 (1990-11-01), Petz et al.
patent: 5112469 (1992-05-01), Kempf et al.
patent: 5259942 (1993-11-01), Kempf
patent: 5451130 (1995-09-01), Kempf
patent: 5637200 (1997-06-01), Tsymberov
patent: 5669652 (1997-09-01), Reising et al.
patent: 5675957 (1997-10-01), Kim
patent: 5698030 (1997-12-01), Rubenchik

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