Device for transferring semiconductor wafers

Details Device for transferring semiconductor wafers Device for transferring semiconductor wafers

1986-04-18

1989-01-31

Cherry, Johnny D.

Handling: hand and hoist-line implements

Grapple

Multiple grapples for multiple objects

2941191, 294902, B25J 1304, B65G 6500

Patent

active

048011681

ABSTRACT:
An improved semiconductor wafer transferring device lifts and drops at least two groups of semiconductor wafers at different times in each lifting or dropping cycle, in order to reduce the impact sustained by a semiconductor wafer holder such as a wafer boat in the former case and preventing the semiconductor wafer holder from being lifted in the latter case.

REFERENCES:
patent: 4023691 (1977-05-01), Perel
patent: 4286380 (1981-09-01), Blount
patent: 4466766 (1984-08-01), Geren
patent: 4568234 (1986-02-01), Lee et al.
patent: 4573851 (1986-03-01), Butler
patent: 4611966 (1986-09-01), Johnson

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