Device for transferring a workpiece into and out from a vacuum c

Details Device for transferring a workpiece into and out from a vacuum c Device for transferring a workpiece into and out from a vacuum c

1992-06-05

1993-11-09

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

118719, 118730, 20429828, 414217, 414223, C23C 1434

Patent

active

052599426

ABSTRACT:
A device for transferring a workpiece into and out from a vacuum chamber including a first device for receiving and holding the workpiece in a disk-shaped conveyor within the chamber and a second device for lifting and supporting the first device during the transfer process.

REFERENCES:
patent: 3915117 (1975-10-01), Schertler
patent: 4534314 (1985-08-01), Ackley
patent: 4548699 (1985-10-01), Hutchinson et al.
patent: 4588343 (1986-05-01), Garrett
patent: 4670126 (1987-06-01), Messer et al.
patent: 4701251 (1987-10-01), Beardow
patent: 4756815 (1988-07-01), Turner et al.
patent: 4820106 (1989-04-01), Walde et al.
patent: 4869801 (1989-09-01), Helme et al.
patent: 4886592 (1989-12-01), Anderle et al.

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