Device for thermally enhanced ultrasonic bonding with localized

Metal fusion bonding – Process – Using high frequency vibratory energy

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228 11, 219 8516, 219 8518, B23K 2010

Patent

active

052401669

ABSTRACT:
A single point bonding tool for use in ultrasonically bonding a fine or ultrafine wire to another electrical conductor, has a thin film resistor integrally formed thereon. The thin film resistor is integrally formed on the bonding tip by standard photolithographic techniques applied to the bonding tool. The tool combines ultrasonic energy and thermal energy provided by the resistor to provide required bonding energy that may be localized both in space and in time. The result offers optimized energy transfer to the selected workpieces and minimizes risk of damage to adjacent, heat sensitive devices.

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