Device for the suppression of arcs

Details Device for the suppression of arcs Device for the suppression of arcs

1993-02-25

1994-01-25

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429826, 20429841, 20419212, C23C 1434

Patent

active

052813215

ABSTRACT:
The invention relates to a device for the suppression of arcs in gas discharge arrangements having two cathodes (6, 7) and one anode (4) supplied from an electric energy source (10). Between the electrical terminals of this electric energy source (10) and the cathode (6, 7) is provided a circuit configuration having two switching elements (15, 25) which upon the occurrence of arcs are through-switched.

REFERENCES:
patent: 4919968 (1990-04-01), Buhl et al.
patent: 4936960 (1990-06-01), Siefkes et al.
"The MDX as a Strategic Tool in Reducing Arcing" by Douglas S. Schatz in 1985.

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