Device for the releasable fastening of a target or target base o

Details Device for the releasable fastening of a target or target base o Device for the releasable fastening of a target or target base o

1992-01-27

1993-08-03

Weisstuch, Aaron

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429809, 20429819, C23C 1434

Patent

active

052325725

ABSTRACT:
In a device for the releasable fastening of a target (3) or target base (5) together with a magnet yoke (31) on the cathode mounting of the process chamber in a cathode sputtering apparatus, the target base (5) is provided with locking toggles (11, . . . ) extending perpendicular to the target plane and able to enter through openings (42, . . . ) in the bottom of the magnet yoke (31) and cooperating with locking levers or disks journaled on the cathode mounting or arresting device (17) in the manner of a bayonet lock or of a bascular lock and after being turned pull the target base (5) tightly onto the cathode mounting or release the locking toggles (11, . . . ) so that the target (3) can be removed from the cathode mounting.

REFERENCES:
patent: 4204936 (1980-05-01), Hartsough
patent: 4668373 (1987-05-01), Rille et al.
patent: 4820397 (1989-04-01), Fielder et al.
patent: 4885075 (1989-12-01), Hillman
patent: 5032246 (1991-07-01), Blazic et al.
patent: 5112467 (1992-05-01), Zejda
patent: 5147521 (1992-09-01), Belli et al.

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