Device for the rapid depositing of oxides in thin layers which a

Details Device for the rapid depositing of oxides in thin layers which a Device for the rapid depositing of oxides in thin layers which a

1974-09-20

1977-02-01

Grimley, Arthur T.

Electric heating

Metal heating

By arc

427 34, 118 491, B23K 500

Patent

active

040063402

ABSTRACT:
An apparatus consisting in forming, with the oxide to be sprayed on, a plasma in an arc state within a source cavity. The state is stabilized by various known methods but which are well-adapted and the substrate to be covered is preferably kept at a predetermined distance, in order of 50 cm, from the source cavity.
A positive pressure gas is supplied to the source cavity and vacuum pressure is maintained in the enclosure supporting the substrate facing the cavity opening to deposit oxide uniformly at high speed.

REFERENCES:
patent: 3277265 (1966-10-01), Reboux
patent: 3296410 (1967-01-01), Hedger
patent: 3614510 (1971-10-01), Maskell

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