Device for the projection printing of masks into a workpiece

Details Device for the projection printing of masks into a workpiece Device for the projection printing of masks into a workpiece

1983-06-24

1985-09-10

Hix, L. T.

Photocopying

Projection printing and copying cameras

Step and repeat

355 54, 356401, G03B 2742

Patent

active

045402779

ABSTRACT:
In order to determine magnification and/or alignment in a device for the projection printing of a pattern on a mask onto a substrate an adjustment plate insertable below the projection lens is provided, said adjustment plate being provided with light-transmitting zones conjugated with recesses in the mask in respect of the projection lens in the exposure light, photometer means being arranged below said light-transmitting zones.

REFERENCES:
patent: 4357100 (1982-11-01), Mayer et al.
patent: 4452526 (1984-06-01), Johannsmeier et al.

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