Device for the preparation of a gas mixture

Details Device for the preparation of a gas mixture Device for the preparation of a gas mixture

1987-09-30

1989-02-07

Scott, Jr., Leon

Coherent light generators

Particular active media

Gas

372 59, 372 37, 372 38, H01S 322

Patent

active

048036935

ABSTRACT:
A device for the preparation of a gas mixture includes a closed circuit. Mixture components of a gas mixture are fed with greatly differing partial pressures ranging from low to highest partial pressures to the closed circuit. The gas mixture is circulated in the closed circuit. At least one of the mixture components with low partial pressure is replenished at increasingly shorter intervals. The gas mixture is completely exchanged when a given minimal length of the intervals is reached. At least one branch parallel to a section of the closed circuit conducts the gas mixture substantially completely free of flow losses. The at least one branch includes a magnetic valve, a differential pressure sensor in series with the magnetic valve having a total measuring range corresponding to the low partial pressures, the differential pressure sensor controlling the replenishment of the mixture components having the low partial pressure exclusively while the magnetic valve is closed, and an absolute pressure sensor controlling at least the replenishment of the mixture component having the highest partial pressure.

REFERENCES:
patent: 3982200 (1976-09-01), Hoag
patent: 4502145 (1985-02-01), Allen et al.
patent: 4722090 (1988-01-01), Haruta et al.
Publication "Laser und Optoelektronik", No. 2/1985.
Publication "Excimer Lasers with Magnetic Switch Control" EMG 100 MSC Series, EMG 200 MSC Series.
Patent Abstracts of Japan, vol. 8, No. 247, Nov. 1984.
IBM Technical Disclosure Bulletin, vol. 25, No. 3B, Aug. 1982, pp. 1492-1493.

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