Device for the light-optical, computer-controlled drawing of mas

Details Device for the light-optical, computer-controlled drawing of mas Device for the light-optical, computer-controlled drawing of mas

1975-08-15

1976-10-12

Moses, R. L.

Photocopying

Projection printing and copying cameras

Plural

346 76L, 354 4, 354118, 355 2, G03B 2744

Patent

active

039854396

ABSTRACT:
A device for electro-optically, computer-controlled drawing of a plurality of mask patterns in a layer of light sensitive material disposed on a plane of a mask carrier characterized by a source of coherent light, a modulator for modulating the coherent light, a light detector for imposing a row-by-row scanning motion on the beam of light, an objective device for projecting the beam onto a layer of the light sensitive material, optical lenses arranged between the light deflector and the objective device for imaging the output plane of the light deflector onto a plane of the objective which includes an objective lens arrangement for focusing the beam and a multiplier hologram for splitting up the focused beam emerging from the objective lens arrangement into a plurality of identical sub-beams directed in different directions so that the plurality of spaced identical mask patterns are simultaneously formed in a light sensitive layer. Preferably, the device includes an immersion means such as a glass body which is disposed between the objective device and the plane of the mask carrier.

REFERENCES:
patent: 3295409 (1967-01-01), Debrie
patent: 3545854 (1970-12-01), Olsson
patent: 3584948 (1971-06-01), Herriott
patent: 3609027 (1971-09-01), Lowenthal
patent: 3656849 (1972-04-01), Lu
patent: 3791275 (1974-02-01), Bryngdahl

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