Radiant energy – Ion generation – Electron bombardment type
Patent
1995-12-11
1997-04-22
Berman, Jack I.
Radiant energy
Ion generation
Electron bombardment type
21912127, 313146, H01J 37075, H01J 37065
Patent
active
056231482
ABSTRACT:
The invention which relates to a device for the generating of electron beams with a vacuum chamber, in which a massive cathode (10) is arranged with a wire cathode (14) arranged above and a aperture anode (17) below the massive cathode (10) and whom below the aperture anode (17) focusing and/or deflecting magnet arrangements are provided which direct an electron beam (23) emitted by the massive cathode (10) and accelerated by the aperture anode (17) to a processing location (22), has the basic task to make the power of such devices variable over a large range using simple mechanical means. According to the invention the task is solved by arranging the aperture anode (17) rigidly and the massive cathode (10) and the wire cathode (14) axially movable within the vacuum chamber (1). For the movements of the massive cathode (10) and the wire cathode (14) contact means are provided which follow their movements and lead to the outside of the vacuum chamber (1). In addition for the axial movement of the massive cathode (10) a motion means is provided connected with the cathode (Figure).
REFERENCES:
patent: 3182175 (1965-05-01), Sibley
patent: 4665297 (1987-05-01), Schiller et al.
patent: 4952802 (1990-08-01), Duryea
Erbkamm Wolfgang
Gawer Olaf
Wenzel Bernd-Dieter
Berman Jack I.
von Ardenne Anlagentechnik GmbH
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