Coating apparatus – Immersion or work-confined pool type – With tank structure – liquid supply – control – and/or...
Patent
1984-11-30
1986-07-15
Lusignan, Michael R.
Coating apparatus
Immersion or work-confined pool type
With tank structure, liquid supply, control, and/or...
118694, 118712, B05C 300, B05C 1100, B05C 1902
Patent
active
045999694
ABSTRACT:
Tank for depositing a monomolecular film. It comprises a tank having walls and a base and containing a liquid, a barrier defining two areas on the surface of the liquid, means for displacing the barrier on the surface of the liquid, at least one substrate and means for displacing the substrate. The level of the liquid is below the horizontal rim of the tank. The barrier has a break at each of its ends and rests on the edges of the tank. The break defines a narrower portion partly submerged in the liquid. Sealing means are provided between the faces of the narrower portion and the facing walls.
Barraud Andre
Lelcuf Jean
Commissariat a l''Energie Atomique
Lusignan Michael R.
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