Device for the encapsulated reception of a material

Electric heating – Heating devices – Combined with diverse-type art device

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338 34, 338307, H05B 100

Patent

active

061146587

DESCRIPTION:

BRIEF SUMMARY
The present invention refers to a device for the encapsulated reception of a material, especially a sensitive material. In particular, the present invention deals with a miniaturizable device for the encapsulated reception of a sensitive material, which is adapted to be opened electrically.
In many fields sensitive materials, e.g. chemical indicator materials, catalysts, pharmaceuticals, are used. Sensitive means that the lifetime, i.e. the usability for a specific purpose, is reduced when the material comes into contact with a specific substance or mixture of substances. In view of this limited lifetime, it is desirable to expose these materials only a short time before they are used in the detrimental measurement medium and to keep them under a protective gas or a protective liquid or a vacuum up to this time. The detrimental measurement medium can be identical with the substance to be measured.
Conventional methods used for this purpose are the encapsulation of the substance in a glass bulb, plastic foils or similar packings. These methods are disadvantageous in many respects: the encapsulation methods can be miniaturized only to a limited extent and/or the closure cannot be opened automatically or necessitates complicated measures for being opened automatically. Such sensitive substances are also enclosed in a vessel communicating with the outside world via a valve and/or a hose system. This device can be opened automatically, but the speed with which it is opened mechanically may here be insufficient for some cases of use. It is therefore impossible to react to rapid events. In addition, the necessary mechanics limits the minimum size that can be achieved as well as the reduction of costs.
The direct coating of the substance to be protected e.g. with electrically evaporable materials can-be used only to a very limited extent, since this method often results in an irreversible contamination of the material coated.
DE 3919042 A1 discloses a system for analysing solid substances on mercury. In this known system a solid substance to be analysed is introduced in a vessel which is then closed by a diaphragm; when a cover has been placed on top of the diaphragm onto the rim of the vessel, the diaphragm is destroyed by heating the solid substance and by an excess pressure in the vessel resulting from such heating. The device used in the system disclosed in DE 3919042 A1 is, however, not suitable for large-batch production.
DE 3520416 C2 describes a device for opening a partition in a controlled manner, said partition consisting of a diaphragm inserted in a tightening ring and having heating wires applied thereto, said heating wires causing the diaphragm to open when supplied with electric energy. Also this device is unsuitable for mass production e.g. by means of microchemical methods.
DE 3818614 A1 and DE 3915920 A1 disclose micromechanical structures provided with a plurality of depressions for receiving small amounts of material, in particular in the field of biotechnology. The depressions are closed by means of a cover which is preferably provided with raised portions that are complementary to said depressions.
For the purpose of proving substances in gases or liquids e.g. a plurality of transducers having different structural designs exists. Many of them function according to the principle of measuring the resistance or the capacitance of the indicator material. With regard to such transducer designs reference is made to H.-E. Endres, S. Rost, H. Sandmaier "A PHYSICAL SYSTEM FOR CHEMICAL SENSORS", Proc. Microsystem Technologies, Berlin, 29.10.-01.11.91, 70-75. A change in this quantity (these quantities) is correlated with an event in the medium to be examined. The structures, e.g. interdigital structures, required for measuring e.g. the resistance are often applied to a substrate in thin-film technology, said substrate being e.g. silicon, quartz. The support of these sensors can itself again be a diaphragm structure.
The production of thin diaphragm structures, e.g. Si.sub.3 N.sub.4 on an Si support mat

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