Device for the detecting of charged secondary particles

Details Device for the detecting of charged secondary particles Device for the detecting of charged secondary particles

1989-08-14

1991-01-08

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

With detector

250310, G01N 2300, H01J 314

Patent

active

049838334

ABSTRACT:
A device for the detection of secondary electrons triggered at a large-area specimen is composed of a tube electrode arranged concentrically relative to the primary beam axis of an electron beam measuring device and an electrostatic or magnetic octupole for the deflection of the secondary electrons in the direction of a detector. An opposing electrical field is formed by two hemispherically shaped electrodes. The tube electrode which is arranged immediately above the specimen, and preferably has a circular cross-sectional area, whereby the tube diameter is selected larger than the diagonal of the specimen. An electrical extraction field that is rotationally symmetric with respect to the primary beam axis is generated inside the device. The secondary particles will be accelerated in the direction of the deflection unit.
In the electrical extraction field, the particles are detected independently of the location of the respective measuring point inside the scanned field that is 20.times.20 cm.sup.2 in size.

REFERENCES:
patent: 4658136 (1987-04-01), Ohtaka et al.
patent: 4658137 (1987-04-01), Garth et al.
patent: 4769543 (1988-09-01), Plies
patent: 4779046 (1988-10-01), Rouberoi et al.

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