Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Patent
1995-06-30
1998-02-17
Dzierzynski, Paul M.
Optical: systems and elements
Deflection using a moving element
Using a periodically moving element
359216, G02B 2608
Patent
active
057196940
DESCRIPTION:
BRIEF SUMMARY
BACKGROUND OF THE INVENTION
a) Field of the Invention
The invention is directed to a device for the deflection of light beams, preferably for deflection of laser beams, with mirror surfaces which are arranged at a drivable rotating body.
b) Description of the Related Art
For the purpose of deflecting laser beams which require a continuous beam deflection for larger angles and a high deflecting speed, it is known in the art to use polygon mirrors which are driven in rotation. It is disadvantageous that the extremely complicated manufacture of these mirrors results in extraordinarily high costs. Further, the tilting freedom of the individual mirror segments with respect to the axis of rotation can not be ensured in the known polygon mirrors.
Further, deflecting mirror arrangements for light beams in which mirror surfaces which are suspended at torsional strips can tilt about the rotational axis or in which the mirror surfaces are arranged at the end of movable tongue constructions are known from the field of microtechnology. Electrostatic, piezoelectric or electrothermal drives which are generally functionally integrated with mechanics are used for such systems.
Although beam deflections of +/-10.degree. can be realized by means of such arrangements, the respective mirror surfaces can only be produced in the range of 50.times.50 .mu.m.sup.2 to 500.times.500 .mu.m .sup.2. In known systems, the dynamic response has proven very problematic. At high frequencies, the attainable deflecting angle decreases drastically since the forces required for accelerated movement of the mirror surfaces can no longer be applied using the selected drive principles. Moreover, there occur vibration modes which result in a warping of the mirror surfaces. In order to enable a more reliable movement of the mirror surfaces also at higher frequencies, their mass must be drastically reduced, which is only possible in existing mirror surfaces by reducing their thickness. However, this leads to increased development of vibrations on the mirror surface and accordingly to operating disturbances.
OBJECT AND SUMMARY OF THE INVENTION
The summary object of the present invention is to provide a beam deflecting system which enables a high deflecting frequency at large deflecting angles and for large mirror surfaces, ensures a tilting freedom of the individual segments with respect to the rotational axis and can be manufactured economically.
This object is met according to the invention for the deflection of light beams including the deflection of laser beams. The device comprises a drivable rotating body. Mirror surfaces are arranged at the drivable rotating body. The rotating body is formed of microcrystalline material. The mirror surfaces are formed by crystal planes of the microcrystalline material and are arranged so as to be symmetric with respect to rotation.
The arrangement according to the invention is characterized in particular by the following advantages: beam diameters; processing in microelectronics can be used in micromechanics; materials.
The invention is explained more fully in the following with reference to embodiment examples.
BRIEF DESCRIPTION OF THE DRAWINGS
In the drawings:
FIGS. 1 and 2 show a device according to the invention in which the mirror surfaces are located in a depression on the rotating body; and
FIGS. 3 and 4 show a device according to the invention in which the mirror surfaces are located at a mesa structure arranged on the rotating body.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
In the arrangement shown in FIGS. 1 and 2, the base body 1 contains a cut out portion 11 whose dimensions are greater than those of the disk-shaped rotating body 2. The rotating body 2 is formed of a monocrystalline material, preferably silicon, and contains a centrally arranged polygonal depression 21. The depression 21 is defined laterally by crystal planes of the rotating body 2 forming the mirror surfaces 22. An annular, segmented hard-magnetic layer 23 whose center defines the rotational axis of the rotating body 2 is lo
REFERENCES:
patent: 4726640 (1988-02-01), Iwama et al.
patent: 4938551 (1990-07-01), Matsumoto
patent: 5042887 (1991-08-01), Yamada
patent: 5170278 (1992-12-01), Wada et al.
Patent Abstracts of Japan, vol. 16, No. 269 (C-952) Jun. 17, 1992 (JP,A 04 065 393 (Nippon Telegr.) Mar. 2, 1992.
Heim Ulf
Schwesinger Norbert
Wurmus Helmut
Dzierzynski Paul M.
Laser-Display-Technologie KG
LDT GmbH & Co.
Schuberg Darren E.
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