Device for the coating of objects

Details Device for the coating of objects Device for the coating of objects

2002-08-07

2008-10-14

Hassanzadeh, Parviz (Department: 1792)

Coating apparatus

Gas or vapor deposition

With treating means

C118S7230MR, C118S7230MA, C156S345360, C156S345410, C156S345420

Reexamination Certificate

active

07434537

ABSTRACT:
An apparatus for coating objects having a single microwave source, two or more coating chambers, and an impedance structure or a waveguide structure. The coating chambers are connected to the single microwave source. The impedance structure or waveguide structure divides the microwave energy in order to generate plasmas in the coating chambers.

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