Device for the accurate positioning of an object holder in relat

Details Device for the accurate positioning of an object holder in relat Device for the accurate positioning of an object holder in relat

1974-02-27

1976-01-20

Dobeck, B.

Electricity: motive power systems

Positional servo systems

With particular 'error-detecting' means

318603, 318632, 318685, G05B 106

Patent

active

039341879

ABSTRACT:
A device for the accurate positioning of an object holder in relation to the elements of a particle-type optical system, for example an electron-optical system, comprises for each direction of displacement a comparator which compares the position required by a computer, with the number recorded by a counter counting the fringes in an interferometer. The comparator is connected to a three-output logic circuit which can adopt each of two logic levels. The states of the outputs represent the direction of displacement to be produced, and its amplitude. A stepping motor receives the pulses from a clock which adopts two preset frequencies that are controlled by said three outputs.

REFERENCES:
patent: 3502880 (1970-03-01), Martinek et al.
patent: 3566239 (1971-02-01), Taniguchi
patent: 3742326 (1973-06-01), Okuda
patent: 3786332 (1974-01-01), Hepner et al.
patent: 3805138 (1973-01-01), Hilker

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