Device for testing structures

Details Device for testing structures Device for testing structures

1976-01-02

1979-06-19

McGraw, Vincent P.

Optics: measuring and testing

Document pattern analysis or verification

356239, 350162SF, G06K 908, G01N 2132, G02B 518

Patent

active

041585020

ABSTRACT:
The present invention provides a device for a very precise analyse of fine structures by means of optical filtration. The intensity maxima derived from the radiation energy emitted by a defecteous structure are measured from a definite magnitude of error downward.

REFERENCES:
patent: 3743423 (1973-07-01), Heinz et al.

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