Device for testing semiconductor devices at a high temperature

Details Device for testing semiconductor devices at a high temperature Device for testing semiconductor devices at a high temperature

1984-11-19

1986-08-05

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 73AT, 324158R, G01R 3126, G01R 3128

Patent

active

046045724

ABSTRACT:
Apparatus for testing semiconductor devices at a high temperature comprising: a heating portion where the semiconductor device to be tested is heated to a predetermined temperature; a testing portion; a assembly for holding the chucking semiconductor device, the chucking assembly having a heating element for heating the semiconductor device and a thermosensor; a conveyor assembly for conveying the semiconductor device chucked by the chucking assembly to the testing portion; and, a central processing unit and memory circuit for controlling the temperature of the heating element in response to the output of the thermosensor.

REFERENCES:
patent: 3039604 (1962-06-01), Bickel et al.
patent: 3437929 (1969-04-01), Glenn
patent: 3979671 (1976-09-01), Meeker et al.

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