Device for testing masks for semiconductor components

Details Device for testing masks for semiconductor components Device for testing masks for semiconductor components

1975-08-19

1977-02-22

Corbin, John K.

Optics: measuring and testing

Inspection of flaws or impurities

Transparent or translucent material

350285, 356200, G01N 2132, G02B 2717

Patent

active

040089673

ABSTRACT:
A device for testing masks, such as used in producing semiconductor components characterized by a source projecting a beam of coherent light at the mask, a multiple optic means which is either a lens raster or an objective lens arranged with a multiple hologram disposed in the path of the beam of light for converting the beam into a plurality of individual beams and focusing each of the individual beams on discrete points on the mask and a detector for detecting any light passed by the mask. Preferably, the device includes means for pivoting the beam from the source about one or two axes lying in a plane of the multiple optic means so that all of the individual beams are moved to scan in at least one direction.

REFERENCES:
patent: 3405614 (1968-10-01), Lin et al.
patent: 3508808 (1970-04-01), Schmidt
patent: 3776616 (1973-12-01), Douklias
patent: 3802762 (1974-04-01), Kiemle
patent: 3814943 (1974-06-01), Baker et al.

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