Coating apparatus – With treatment of coating material – Of recirculated coating material
Patent
1997-02-18
1998-06-16
Edwards, Laura
Coating apparatus
With treatment of coating material
Of recirculated coating material
118610, 118 52, 118 56, 118319, 118321, 118323, B05C 500
Patent
active
057663599
ABSTRACT:
An apparatus for surface coating or for lacquering a substrate, such as a disk-shaped substrate 2, which can be placed on a substrate carrier 14 and can be driven or given a rotating movement by means of a drive device, wherein the material or the lacquer fluid 5 to be applied is placed on the substrate 2 from a feed device 6. The fluid medium or the lacquer 4 released by the substrate support 14 is delivered at least to a first collecting reservoir 17 which is connected with at least one filter 28, from where the fluid is indirectly or directly conducted via a pump 29 to the first collecting reservoir 27, wherein an underpressure can be set between a first flow-off line 33 of the first collecting reservoir 27 and the pump 29.
Gerigk Reinhard
Sichmann Eggo
Edwards Laura
Singulus Technologies GmbH
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