Device for suppressing flashovers in cathode sputtering installa

Details Device for suppressing flashovers in cathode sputtering installa Device for suppressing flashovers in cathode sputtering installa

1995-11-20

1997-03-18

Breneman, R. Bruce

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429803, 20429806, 20429814, 20429826, C23C 1454

Patent

active

056118996

ABSTRACT:
An AC voltage source connected to at least one cathode is switched off rapidly upon the occurrence of a critical number of so-called "microarcs" which precede a "large arc". In order to be able to differentiate between large arcs and microarcs, a special counting and evaluation device is provided.

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Eliasson et al., "Ozone synthesis from oxygen in dielectric barrier discharges", J. Phys. D.: Appl. Phys. 20(1987) 1421-1437.
Eliasson et al., "Nonequilibrium Volume Plasma Chemical Processing" IEEE Transactions on Plasma Science, vol. 19, No. 6 (Dec. 1991) 1063-77.

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