Device for supporting a wafer

Details Device for supporting a wafer Device for supporting a wafer

1991-10-02

1993-03-09

Bishop, Steven C.

Chucks or sockets

Socket type

Radially reciprocating jaws

118503, 279110, B23B 31171

Patent

active

051920875

ABSTRACT:
A device for supporting a wafer comprises a base plate for arranging the wafer thereabove and a plurality of supports circumferentially arranged on the base plate to support the peripheral of the wafer. In order to expose portions of the wafer covered by the supports, either an annular member to engage with the supports for moving them radially outward, or a roller driven by a motor to rotate the wafer relative to the supports is provided.

REFERENCES:
patent: 95337 (1869-09-01), Goulden
patent: 463392 (1891-11-01), Skinner
patent: 1433818 (1922-10-01), Hill
patent: 2421281 (1947-05-01), McKay et al.
patent: 3026128 (1962-03-01), Willis
patent: 3814449 (1974-06-01), Buck
patent: 3975030 (1976-08-01), Akeel et al.
patent: 4062318 (1977-12-01), Ban et al.
patent: 4238526 (1980-12-01), Chitouras
patent: 4482162 (1984-11-01), Anegawa

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