Device for spin-coating substrates

Details Device for spin-coating substrates Device for spin-coating substrates

2006-10-19

2010-02-16

Lamb, Brenda A (Department: 1792)

Coating apparatus

With means to centrifuge work

C118S056000

Reexamination Certificate

active

07661385

ABSTRACT:
A device for spin-coating substrates with liquid media is provided, including a rotatable substrate plate for horizontally supporting a substrate, and a covering unit for covering the substrate during a distribution operation of the liquid medium by means of rotation of the substrate holder. The substrate holder is adapted to be joined tightly to the covering unit, so that passage holes arranged circumferentially on the substrate holder so that an internal coating space, defined by the covering unit and the substrate holder, is in fluid communication with the environment outside the internal space.

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patent: 6068881 (2000-05-01), Valley et al.
patent: 2001/0009135 (2001-07-01), Hasbe et al.
patent: 59-090928 (1984-05-01), None
patent: WO 02/071154 (2002-09-01), None
patent: WO 2004/001812 (2003-12-01), None

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