Device for scanning an object with a light beam

Details Device for scanning an object with a light beam Device for scanning an object with a light beam

1977-04-22

1980-04-22

Corbin, John K.

Optics: measuring and testing

Range or remote distance finding

With photodetection

350 68, 356445, 358 75, G02B 2717

Patent

active

041992199

ABSTRACT:
Disclosed in this specification is a scanning device which scans an object having a flat reflection surface and an inclined reflection surface with an inclination relative to the flat reflection surface such as, for example, a mask and a wafer to be used in manufacturing IC, LSI, etc., with light beam, and detects only the reflected light from the inclined reflection surface with a light detector. In order to make it possible to detect only the reflected light from the inclined reflection surface with the light detector, a telecentric lens is used as the scanning lens in this scanning device, and the original point of deflection of the above-mentioned light beam coincides with the center of the pupil of this telecentric lens. In addition, a filter is disposed on the pupil surface to intercept light from the flat reflection surface.

REFERENCES:
patent: 3565568 (1971-02-01), Hock
patent: 3796497 (1974-03-01), Mathisen
patent: 4062623 (1977-12-01), Suzuki et al.

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