Optics: measuring and testing – Range or remote distance finding – With photodetection
Patent
1978-01-17
1979-08-21
Henry, Jon W.
Optics: measuring and testing
Range or remote distance finding
With photodetection
356400, G02B 2717, G02B 1127
Patent
active
041651499
ABSTRACT:
Disclosed in this specification is a scanning device which scans an object having a flat reflection surface and an inclined reflection surface with an inclination relative to the flat reflection surface such as, for example, a mask and a wafer to be used in manufacturing IC, LSI, etc., with light beam, and detects only the reflected light from the inclined reflection surface with a light detector. In order to make it possible to detect only the reflected light from the inclined reflection surface with the light detector, a telecentric objective lens is used as the scanning lens in this scanning device, and the original point of deflection of the above-mentioned scanning light beam coincides with the center of the pupil of this telecentric objective lens. In addition, a filter is disposed on the pupil surface to intercept light from the flat reflection surface. An optical system between the scanning device and the object is of f-.theta.lens characteristics in order to compensate the non-linearity of the scanning beam caused by uniform angular velocity movement of the scanning device or the like.
REFERENCES:
patent: 3016464 (1962-01-01), Bailey
patent: 3943359 (1976-03-01), Matsumoto et al.
Hirabayashi Yoichi
Suzki Akiyoshi
Canon Kabushiki Kaisha
Henry Jon W.
LandOfFree
Device for scanning an object with a light beam does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Device for scanning an object with a light beam, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device for scanning an object with a light beam will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1321358