Device for scanning an object with a light beam

Optics: measuring and testing – Range or remote distance finding – With photodetection

Patent

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Details

Other Related Categories

356400, G02B 2717, G02B 1127

Type

Patent

Status

active

Patent number

041651499

Description

ABSTRACT:
Disclosed in this specification is a scanning device which scans an object having a flat reflection surface and an inclined reflection surface with an inclination relative to the flat reflection surface such as, for example, a mask and a wafer to be used in manufacturing IC, LSI, etc., with light beam, and detects only the reflected light from the inclined reflection surface with a light detector. In order to make it possible to detect only the reflected light from the inclined reflection surface with the light detector, a telecentric objective lens is used as the scanning lens in this scanning device, and the original point of deflection of the above-mentioned scanning light beam coincides with the center of the pupil of this telecentric objective lens. In addition, a filter is disposed on the pupil surface to intercept light from the flat reflection surface. An optical system between the scanning device and the object is of f-.theta.lens characteristics in order to compensate the non-linearity of the scanning beam caused by uniform angular velocity movement of the scanning device or the like.

REFERENCES:
patent: 3016464 (1962-01-01), Bailey
patent: 3943359 (1976-03-01), Matsumoto et al.

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