Device for scanning a target with a beam of charged particles

Details Device for scanning a target with a beam of charged particles Device for scanning a target with a beam of charged particles

1977-02-15

1978-08-29

Dixon, Harold A.

Radiant energy

With charged particle beam deflection or focussing

With target means

250492B, 313 35, G01K 108

Patent

active

041106237

ABSTRACT:
A device for furnishing a scanning beam intended for irradiating a target, the irradiating dose level having a predetermined distribution on the target. The device comprises a main magnetic system having a plurality of polepieces for scanning the charged particle beam and a secondary magnetic system having a plurality of polepieces and being located upstream of the main magnetic system for variably offsetting the beam entering the main magnetic system. In a preferred embodiment the main and secondary magnetic systems are provided with quadripoles with respective coils which are supplied in pairs with signals S.sub.X1, S.sub.Y1, and S.sub.X2, S.sub.Y2, the signals S.sub.X1, S.sub.Y1 being for example of "sawtooth" waveform and those S.sub.X2, S.sub.Y2 of "squarewave" waveform. The signals may be co-phasal or in phase-opposition.

REFERENCES:
patent: 2602751 (1952-07-01), Robinson
patent: 2816231 (1957-10-01), Nygard
patent: 2858442 (1958-10-01), Dewey
patent: 3371206 (1968-02-01), Takizawa

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