Gas separation: processes – Selective diffusion of gases – Selective diffusion of gases through substantially solid...
Patent
1995-02-23
1997-07-08
Spitzer, Robert
Gas separation: processes
Selective diffusion of gases
Selective diffusion of gases through substantially solid...
96 6, B01D 1900
Patent
active
056456255
ABSTRACT:
An apparatus and a method for delivering a liquid are disclosed. The liquid contained in a vessel is subjected to a pressurized gas. Any pressurized gas dissolved in the liquid is removed in a degas module by passing the liquid through a gas permeable tube subjected to a pressure differential. Then the liquid is dispensed by a liquid mass flow controller.
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Burkhart Christopher W.
Lind Jeffrey W.
Pomeroy Charles E.
Santiago Tito H.
van Schravendijk Bart J.
Novellus Systems Inc.
Spitzer Robert
Steuber David F.
Suryadevara Omkar K.
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