Device for removing dissolved gas from a liquid

Gas separation: processes – Selective diffusion of gases – Selective diffusion of gases through substantially solid...

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

96 6, B01D 1900

Patent

active

054258030

ABSTRACT:
An apparatus and a method for delivering a liquid are disclosed. The liquid contained in a vessel is subjected to a pressurized gas. Any pressurized gas dissolved in the liquid is removed in a degas module by passing the liquid through a gas permeable tube subjected to a pressure differential. Then the liquid is dispensed by a liquid mass flow controller.

REFERENCES:
patent: H1083 (1992-08-01), Meyer et al.
patent: 3631654 (1972-01-01), Riely et al.
patent: 3751879 (1973-08-01), Allington
patent: 4325715 (1982-04-01), Bowman et al.
patent: 4430098 (1984-02-01), Bowman et al.
patent: 4459844 (1984-07-01), Burkhart
patent: 4469495 (1984-09-01), Hiraizumi et al.
patent: 4484936 (1984-11-01), Sakai
patent: 4869732 (1989-09-01), Kalfoglou
patent: 4917776 (1990-04-01), Taylor
patent: 4986837 (1991-01-01), Shibata
patent: 4990054 (1991-02-01), Janocko
patent: 5078755 (1992-01-01), Tozawa et al.
patent: 5183486 (1993-02-01), Gatten et al.
patent: 5194074 (1993-03-01), Hauk
patent: 5205844 (1993-04-01), Morikawa
Yasuyuki Yagi, Takashi Imaoka, Yasuhiko Kasama, and Tadahiro Ohmi, "Advanced Ultrapure Water Systems With Low Dissolved Oxygen For Native Oxide Free Wafer Processing," 1992 IEEE, IEEE Transactions on Semiconductor Manufacturing, vol. 5, No. 2, May 1992.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Device for removing dissolved gas from a liquid does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Device for removing dissolved gas from a liquid, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device for removing dissolved gas from a liquid will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1841982

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.