Radiant energy – Means to align or position an object relative to a source or...
Patent
1990-01-26
1991-09-24
Berman, Jack I.
Radiant energy
Means to align or position an object relative to a source or...
250397, 250310, 378189, 21912123, 21912128, G01N 23225
Patent
active
050515993
ABSTRACT:
The invention relates to a device for recognizing the impact site (29, 37) of a charge carrier beam on a target. This device has two position-sensitive detectors (22, 23) above the target which have a given distance from each other and from the target and on which via imaging systems (24, 25) the impact site (29, 37) of the charge carrier beam is imaged by means of X-rays. The output signals of these detectors (22, 23) are placed on a special evaluation device which determines all three spatial coordinates of the impact site (29, 37) of the charge carrier beam.
REFERENCES:
patent: 3324813 (1967-07-01), Hashimoto
patent: 4831639 (1989-05-01), Harke
patent: 4843246 (1989-06-01), Benes et al.
Benes Ewald
Groschl Martin
Schmid Michael
Siegmund Hans-Joachim
Thomas Friedrich-Werner
Berman Jack I.
Leybold Aktiengesellschaft
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