Device for quantitative display of the current density within a

Details Device for quantitative display of the current density within a Device for quantitative display of the current density within a

1979-11-05

1981-09-15

Tokar, Michael J.

Electricity: measuring and testing

Determining nonelectric properties by measuring electric...

Erosion

250492B, G01N 2700

Patent

active

042900123

ABSTRACT:
The device for displaying the distribution of current density of a beam of electrically charged particles comprises a support plate of electrically insulating material having a surface area at least equal to the cross-sectional area of the beam and m.times.n=q electrically conducting elements e which are fixed on the support plate in a lattice array of m lines and n columns. These elements e.sub.mn intercept portions of the beam and are each electrically connected to a system designed to process the electrical signals collected by said elements and to display the current density at m.times.n points of the beam cross-section.

REFERENCES:
patent: 3524998 (1970-08-01), Gilbert
patent: 3638111 (1972-01-01), Ennis
A. Fortino et al., Ion Implantation Beam Monitor, IBM tech Bulletin, Vol. 21, No. 6, Nov. 1978, p. 2254.

Affiliated with

Also associated with

Rating

Device for quantitative display of the current density within a does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Device for quantitative display of the current density within a , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device for quantitative display of the current density within a will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-392734