Device for providing glass layers on the inside of a tube

Details Device for providing glass layers on the inside of a tube Device for providing glass layers on the inside of a tube

1987-11-02

1989-07-04

Bueker, Richard

Coating apparatus

Gas or vapor deposition

With treating means

118715, C23C 1600

Patent

active

048440078

ABSTRACT:
A device for providing glass layers on the inside of a tube according to the PCVD process. In this process a microwave resonator is reciprocated along a tube. The resonator, on the side facing the tube, is provided partly with a heat-insulating layer. Said layer may consist of SiO.sub.2, Al.sub.2 O.sub.3, TiO.sub.2 or MgO.

REFERENCES:
patent: 4714589 (1987-12-01), Auwerda

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