Device for projection copying of masks onto a workpiece

Details Device for projection copying of masks onto a workpiece Device for projection copying of masks onto a workpiece

1985-01-23

1986-06-03

Hix, L. T.

Photocopying

Projection printing and copying cameras

Identifying, composing, or selecting

355 53, 355 45, 356401, 250548, G03B 2752

Patent

active

045926484

ABSTRACT:
For a device for projection copying of masks on a semiconductor substrate for the manufacture of integrated circuits, it is intended that the copying of an adjusting mark of the workpiece onto a sensor takes place by means of the projection lens, whereby the directly reflected beams of the light which makes visible the adjusting mark are masked out by a mirror, and the position-sensitive sensor is fastened at the underside of the frame carrying the mask.

REFERENCES:
patent: 3865483 (1975-02-01), Wojcik
patent: 4362385 (1982-12-01), Lobach
patent: 4452506 (1984-06-01), Reeve et al.
Markt and Technik, Nr. 34, Aug. 1983, pp. 28 and 31.

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