Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2003-06-03
2009-08-18
Hassanzadeh, Parviz (Department: 1792)
Coating apparatus
Gas or vapor deposition
With treating means
C156S345410
Reexamination Certificate
active
07574974
ABSTRACT:
The invention relates to a device for the production of a plasma (16) within a housing comprising means for the generation of energy in the microwave spectrum, for the excitation of the plasma, said means comprise at least one basic plasma excitation device with a coaxial applicator (4) of microwave energy, one of the ends of which is connected to a production source (7) of microwave energy, the other end (8) of which is directed to the gas to be excited within the housing. The device is characterised in that each basic plasma excitation device is arranged in the wall (3) of the housing, each applicator (4) having a central core (5) which is essentially flush with the wall of the housing. The central core and the thickness of the wall (3) of the housing are separated by a space (6) coaxial to the central core, said space being totally filled, at least at the end of each applicator, by a dielectric material (14), such that said material is essentially flush with the level of the wall of the housing.
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Arnal Yves Alban-Marie
Lacoste Ana
Lagarde Thierry Léon
Pelletier Jacques
Blakely , Sokoloff, Taylor & Zafman LLP
Centre National de la Recherche Scientifique "CNRS"
Dhingra Rakesh K
Hassanzadeh Parviz
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