Device for pre-ionization in discharge-pumped gas lasers, in par

Details Device for pre-ionization in discharge-pumped gas lasers, in par Device for pre-ionization in discharge-pumped gas lasers, in par

1990-10-25

1992-08-25

Scott, Jr., Leon

Coherent light generators

Particular pumping means

Electrical

372 38, 372 25, 372 37, 372 83, H01S 3097

Patent

active

051425475

ABSTRACT:
Preionization is important for the generation of a homogeneous glow discharge in the gas space of a laser chamber between laser electrodes. TE type excimer lasers operate especially with X-ray preionization, for which high voltage pulses are needed. According to the present invention, the voltage pulses are obtained by means of an auxiliary circuit that includes a branch which is connected in parallel with a high voltage switch or with the laser discharge gap and which incorporates a saturable magnetic inductance and the primary winding of a high voltage pulse transformer connected in series therewith. The high voltage triggering pulses for the preionization element, which is an X-ray tube in particular, are generated in the secondary winding of the transformer. If the branch is connected in parallel with the high voltage switch it also has a series capacitor. If it is in parallel with the laser discharge gap then the branch has a shunt capacitor. In this way, the timing of the preionization and in particular the X-ray pulse, can be adjusted precisely in relation to the voltage rise time through the laser electrodes and in relation to the laser.

REFERENCES:
patent: 4592065 (1986-06-01), de Witte
patent: 4630277 (1986-12-01), Cirkel et al.
patent: 4698819 (1987-10-01), Hirth et al.
patent: 4734841 (1988-03-01), Elliott et al.
patent: 4837773 (1989-06-01), Wakata et al.

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