Device for positioning control

Details Device for positioning control Device for positioning control

1990-10-04

1993-02-02

Shoop, Jr., William M.

Electricity: motive power systems

Positional servo systems

With stabilizing features

318561, 318609, 318610, 318611, 318616, 318617, 318618, 360 7812, 369 53, G05B 501

Patent

active

051840553

ABSTRACT:
A device for positioning control includes a movable stage; an acceleration sensor disposed on the movable table; a feedback loop for controlling movement of the movable table; and an acceleration feedback loop provided in relation to an acceleration signal from the acceleration sensor, wherein the acceleration feedback loop is provided as an internal loop to the feedback loop.

REFERENCES:
patent: 4456860 (1984-06-01), Cann et al.
patent: 4464030 (1984-08-01), Gale et al.
patent: 4654571 (1987-03-01), Hinds
patent: 4692915 (1987-09-01), Moriya et al.
patent: 4742286 (1988-03-01), Phillips
patent: 4810941 (1989-03-01), Ohishi et al.
patent: 4888536 (1989-12-01), Sakai et al.
patent: 4967293 (1990-10-01), Aruga et al.

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