Device for positioning an object

Details Device for positioning an object Device for positioning an object

1977-03-02

1978-10-10

Aegerter, Richard E.

Geometrical instruments

Area integrators

Electrical

33 1M, G01B 525

Patent

active

041188691

ABSTRACT:
The invention discloses a device for positioning an object particularly for an accurate adjustment of semiconductor substrate discs relative to a structured mask. The object disposed on an object mount is independently displaced in x- and y-direction, and rotated in a plane defined by the x, y directions. The displacement and rotation operations and in particularly the respective paths involved do not influence each other.
This is accomplished by three displacement members which directly act upon said object mount in such a manner that one displacement member is arranged in the x-coordinate direction, the point of action being in the intersection of the x, y-coordinate system.
The two other displacement members act in parallel to the y-coordinate direction, their points of action lying on the x-coordinate.
The inventional device can be employed with advantage when an object located in a plane has to be aligned relative to a reference object.

REFERENCES:
patent: 3188078 (1965-06-01), Peterson
patent: 3304552 (1967-02-01), Perschy
patent: 3744902 (1973-07-01), Henker

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