Device for positioning a semi-conductor wafer

Details Device for positioning a semi-conductor wafer Device for positioning a semi-conductor wafer

1988-07-22

1989-12-19

Mis, David

Optics: measuring and testing

By polarized light examination

With light attenuation

198394, 414754, 414757, G01B 1114, G01B 1127, B65G 4724

Patent

active

048879045

ABSTRACT:
A device for detecting a position of an edge of a disk-like workpiece having an outer periphery whose shape includes a portion bearing positional information related to the workpiece, the device including a system for rotationally moving the workpiece; an illuminating system; and a photodetecting system; wherein the illuminating system and the photodetecting system are disposed so as to sandwich therebetween an outer peripheral portion of the workpiece when it is rotationally moved by the moving system and wherein the illuminating system projects, toward the photodetecting system, a light beam having an elongated shape in cross-section.

REFERENCES:
patent: 4105925 (1978-08-01), Rossol et al.
patent: 4407627 (1983-10-01), Sato et al.
patent: 4423958 (1984-01-01), Schmitt
patent: 4441853 (1984-04-01), Kosugi
patent: 4466073 (1984-08-01), Boyan et al.

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