Device for positioning a semi-conductor wafer

Details Device for positioning a semi-conductor wafer Device for positioning a semi-conductor wafer

1986-08-20

1989-08-01

Lall, Parshotam S.

Boots, shoes, and leggings

198394, 356400, 250557, G01B 1100, B65H 920

Patent

active

048538809

ABSTRACT:
A device for positioning a disk-like workpiece, the device having a system for detecting a change in position of an edge of the workpiece, the detecting system producing a signal; a system for selecting a portion of the signal produced by said detecting means, which portion contains desired positional information, the selecting means producing a signal; and a positioning system for rotating the workpiece on the basis of the signal produced by the selecting system, to thereby position the workpiece.

REFERENCES:
patent: 3683195 (1972-08-01), Johannsmeier et al.
patent: 3890508 (1975-06-01), Sharp
patent: 3930684 (1976-01-01), Lasch, Jr. et al.
patent: 3972424 (1976-08-01), Levy et al.
patent: 4024944 (1977-05-01), Adams et al.
patent: 4077579 (1978-03-01), Seleski et al.
patent: 4370059 (1983-01-01), Masuda
patent: 4457664 (1984-07-01), Judell et al.
patent: 4466073 (1984-08-01), Boyan et al.
patent: 4618292 (1986-10-01), Judge et al.
patent: 4633419 (1986-12-01), Niiho et al.
patent: 4641257 (1987-02-01), Ayata
patent: 4685206 (1987-08-01), Kobayashi et al.

Affiliated with

Also associated with

Rating

Device for positioning a semi-conductor wafer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Device for positioning a semi-conductor wafer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device for positioning a semi-conductor wafer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-136924