Device for photolithographically treating a thin substrate

Details Device for photolithographically treating a thin substrate Device for photolithographically treating a thin substrate

1984-01-03

1985-06-11

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

355 53, 355 78, G03B 2760

Patent

active

045224897

ABSTRACT:
A device for photolithographically treating a thin substrate comprises pre-alignment station, a substrate-supporting table and a transport arm which is provided with a vacuum connection for holding the substrate by suction at its lower side during transport of the substrate from the pre-alignment station to the substrate table. The substrate table is provided with supporting means for the substrate which are adjustable in the direction of height and which have a supporting surface which is adjustable to a distance above the substrate table exceeding the thickness of the transport arm and is adjustable in a downward direction at least through a distance such that the supporting surface is level with the upper surface of the substrate table, the supporting means leaving a space free for the movement of the transport arm above a part of the substrate table.

REFERENCES:
patent: 3865254 (1975-02-01), Johannsmeier
patent: 3930684 (1976-01-01), Lasch, Jr. et al.
patent: 4179110 (1979-12-01), Kosugi et al.
patent: 4239381 (1980-12-01), Lacombat et al.
patent: 4278348 (1981-07-01), Funk et al.
patent: 4345836 (1982-08-01), Phillips
patent: 4383757 (1983-05-01), Phillips
patent: 4423954 (1984-01-01), Curti
patent: 4425037 (1984-01-01), Hershel et al.
patent: 4444492 (1984-04-01), Lee

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