Device for optically measuring aspheric surface

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356360, G01B 902

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active

047431172

ABSTRACT:
A device for optically measuring an aspheric surface includes a fringe-scanning shearing interferometer for applying a wavefront of illuminating light to the aspheric surface and optically measuring the aspheric surface based on light reflected by the aspheric surface along a measurement optical path. A plurality of ring filters having respective different light-transmitting areas are successively positionable, one at a time, in the illuminating light and outside of the measurement optical path for applying divided portions of the wavefront of illuminating light successively to the aspheric surface. The radius of curvature of the wavefront of illuminating light applied to the aspheric surface is measured.

REFERENCES:
Kharitonov et al., "On Some Methods of Testing Aspherical Wavefronts by Means of a Shearing Interferometer", Sov. J. Opt. Tech., vol. 43, No. 7, pp. 439-441, 7/76.
Emmel et al., "A New Instrument for Routine Optical Testing of General Aspherics", Proc. SPIE, vol. 171, pp. 93-99, 1979.

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