Optics: measuring and testing – Angle measuring or angular axial alignment – With photodetection remote from measured angle
Patent
1992-02-04
1993-06-08
Buczinski, Stephen C.
Optics: measuring and testing
Angle measuring or angular axial alignment
With photodetection remote from measured angle
250237R, 250561, 356150, 356375, G01C 100, G01C 2106
Patent
active
052184153
ABSTRACT:
A device for detecting the inclination of a surface to be examined is disclosed. The device includes an optical arrangement for directing a radiation beam to the surface to be examined, an arrangement for receiving a reflected beam from the surface to be examined and for outputting a signal corresponding to the inclination of the surface to be examined, and a device for changing the size of the beam on the surface to be examined or the size of the beam at a position which is substantially optically conjugate with the surface to be examined.
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Buczinski Stephen C.
Canon Kabushiki Kaisha
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