Device for observing an object

Details Device for observing an object Device for observing an object

1976-03-30

1977-12-13

Corbin, John K.

Optics: measuring and testing

Range or remote distance finding

With photodetection

350162SF, 350175TS, 350236, 350237, 356120, 356172, 356209, G02B 2106

Patent

active

040626237

ABSTRACT:
A device for observing an object such as, for example, a mask, wafer, and so forth to be used in a printer for IC and LSI, and including a flat reflection surface and an inclined reflection surface having a certain inclination with respect to the flat reflection surface, by which light beam reflected at the flat reflection surface is removed by filter means to make it possible to observe only the inclined reflection surface of the object.

REFERENCES:
patent: 3565568 (1971-02-01), Hock
patent: 3796497 (1974-03-01), Mathisen
Dalton, "Bright Field Reflective Schlieren System," IBM Technical Disclosure Bulletin, vol. 14, No. 1, pp. 66-67, June 1971.

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