Device for mounting and transporting substrates in vacuum appara

Details Device for mounting and transporting substrates in vacuum appara Device for mounting and transporting substrates in vacuum appara

1992-01-30

1993-11-09

Kisliuk, Bruce M.

Work holders

Plural holders to hold workpieces relative to each other

Workpieces parallel to each other

269 45, 269152, B25B 120

Patent

active

052596036

ABSTRACT:
Device for mounting thin, preferably flat substrates (11, 11', . . . ) and for the transport of these substrates (11, 11'. . . ) in treatment apparatus, for example vacuum coating and etching apparatus, the device being formed by a frame (1), preferably in a rectangular shape, which is of such size that in the area surrounded by the frame (1) a support, e.g., a support formed of spoke-like round rods (6, 6', . . . ). can be inserted, and on this support fastening means for mounting the substrates (11, 11', . . . ) are provided, which hold the substrates (11, 11', . . . ) such that their substantially planar lateral surfaces run approximately parallel to the plane of the frame.

REFERENCES:
patent: 2475721 (1949-07-01), Prime
patent: 3865072 (1975-02-01), Kirkman
patent: 4074422 (1978-02-01), Borjesson et al.
patent: 4948108 (1990-08-01), Sullivan

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