Device for measuring the thickness of thin layers

Details Device for measuring the thickness of thin layers Device for measuring the thickness of thin layers

1997-11-29

1999-07-27

Snow, Walter E.

Electricity: measuring and testing

Magnetic

With means to create magnetic field to test material

33834, G01B 706, G01R 3312

Patent

active

059296330

ABSTRACT:
The invention relates to a device for measuring the thickness of thin layers in the low micrometer range, having a measuring probe at an end region of a supporting arm, the measuring pole of which probe can be placed on the surface of the layer, having a damping device at the lower end region of the supporting arm, having a bearing device for the supporting arm and having a drive device, which operates using magnetic forces, for the supporting arm, the bearing device comprising a torsion-spring, the two ends of which are each fastened, transversely to the pivot plane, to their own bearing block (32, 33), and the pivoting movement lying at least essentially in the Hooke's range of the torsion-spring (31), and the damping device operating on the principle of eddy-current damping.

REFERENCES:
patent: 5053703 (1991-10-01), Fischer

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