Device for measuring the thickness of thin films

Details Device for measuring the thickness of thin films Device for measuring the thickness of thin films

1984-12-05

1987-03-03

Church, Craig E.

X-ray or gamma ray systems or devices

Specific application

Fluorescence

378 46, G01B 1502

Patent

active

046481079

ABSTRACT:
The device operates by means of the X-ray fluorescence principle wherein a beam of primary X-rays is directed on to a coated test specimen and X-rays emitted back by the test specimen are counted to determine the thickness of the coating. The device has a stage for supporting test specimens, an X-ray generator, a collimator device for the primary X-rays, a counter for X-rays emitted back by the test specimens, and a displacement device for moving the stage in at least one direction at right angles to the collimator device, and in the direction of the X-ray beam. A rod composed principally of aluminum of a material of low atomic number is positioned at a safe distance beneath the collimator device, and approximately at right angles to the X-ray beam. The shaft of an electric motor imparts periodic motion to the rod. An evaluating device monitors the motion of the rod and outputs a signal when the rod is momentarily stopped.

REFERENCES:
patent: 2851553 (1958-09-01), Grostick
patent: 3810386 (1974-05-01), McAshan, Jr.
patent: 3920984 (1975-11-01), Kirkendall et al.
patent: 4406015 (1983-09-01), Koga

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